Network of Leading Institutions and Laboratories

The Project

Establish the Italian network of research infrastructures in the field of nanofabrication through:

1. establishment of harmonized rules, for clean room management and access policies, IP rules, external costs and reporting;
2. harmonization and sharing of design and simulation software, service contracts, management of professional services;
3. definition of joint best practices for reciprocal support and backup, complementarities, standardization of clean room practices, interoperability and data exchange formats;
4. definition of common information system for know-how, projects and equipment databases.

To promote access to research infrastructure based on the principles as set up by the European Charter for Access to Research Infrastructures.

To support the establishment of the pan-European distributed research infrastructure: EuroNanoLab

Aim and Scope

European Coordination Level

Current situation and challenges

• Fragmented national sites network
• Sites distribution not purposefully designed to address European scale issues

Impact of EuroNanoLab

• Additional national and regional focus
• Clear common goals and coordinated site distribution

It-Fab Project impact:

• Cutting-edge micro and nanofabrication facilities for the manufacture of microelectronic devices and microsystems both for industrial and for research purposes.
• Conventional microelectronic production equipment is combined with large area electronics processes to meet the needs of scholars, innovators and entrepreneurs that want to investigate new device properties or boost new applications into the market.
• A network infrastructure, distributed across Italy, could provide an optimal interface towards the national industrial tissue, mainly composed of SME.

EuroNanoLab at a Glance

Project Coordinator

• Dr. Vittorio Morandi
• E-mail: morandi[at]bo.imm.cnr.it
• Phone: +39 051 639 9141

Steering Committee

Coordinator: Vittorio Morandi

Policy for new It-Fab members

New partners can be Research and Innovation Infrastructures for Micro- and Nano-Fabrication, both from Universities and Research Performing Organizations (RPO), having:

1. A strategic and official (i.e. following the European definition) vision and mission as enabling infrastructure for micro and nanotechnology used by the research communities to conduct research and foster innovation in their fields.
2. A broad users base constituted by several independent research groups. Official access policies and user’s fees for internal and external users, according to the European Charter for Access to Research Infrastructures.
3. Critical dimension corresponding to large area of minimum class ISO 6 and associated relevant equipment: classified area larger than 200 m2 and at least 10 equipment for processing or characterization of materials and micro-nano devices.
4. Fulfil the basic commitments stated in the Memorandum of Understanding of It-FAB, in particular under articles II, IV, V, VI, VII.
5. Commitment to allow access to its infrastructure by the other partners of the network, either by direct access to the infrastructure, or by giving access to processes performed by internal staff.

Project Activities

Work Groups

School on nanotechnologies: processes and applications to sensors and actuators

In the “European Strategy for Key Enabling Technologies”, the EU has defined six Key Enabling Technologies (KET): (1) micro- and nanoelectronics, (2) nanotechnology, (3) industrial biotechnology, (4) advanced materials, (5) photonics and (6) advanced manufacturing technologies, with a strong and well documented global impact. Most of these KETs require state-of-the-art facilities and competence on micro and nano-fabrication, a key area of science and technology that is radically changing our world.

The school is dedicated to Master degree and Ph.D students, as well as to scientists working in the wide field of micro- and nano-technology, offering the opportunity to learn about fundamentals on processes, devices fabrication and characterization processes, with attention to both planar and 3D technologies. Besides the lectures dedicated to single technology steps, building blocks of the silicon-based micro- and nano-fabrication technologies, there will be sessions dedicated to devices application areas. The workshop will be completed with a demo and live sessions from different cleanrooms, to practically show some of the fundamental silicon processing steps. .

The school is organized by It-fab (http://itfab.bo.imm.cnr.it/), the Italian network for Micro and Nano Fabrication research infrastructures, an initiative that aims to (i) establish harmonized rules, for clean room management and access policies, IP rules, external costs and reporting, (ii) harmonize and share design and simulation software, service contracts, management of professional services, (iii) define joint best practices for reciprocal support and backup, complementarities, standardization of clean room practices, interoperability and data exchange formats and (iv) define common information system for know-how, projects and equipment databases. Members of It-fab are CNR-DSFTM (IMM and Nanotec Institutes), PoliFAB from Politecnico di Milano, FBK-CMM and Fondazione Inphotec. It-fab is partner of the EuroNanoLab initiative (http://euronanolab.com)

School on nanotechnologies: processes and applications to sensors and actuators

ENRIS 2019 - European Nanofabrication Research Infrastructure Symposium

European Nanofabrication Research Infrastructure Symposium (ENRIS) 2019 is the 2nd edition of the biannual international conference on clean­room operation, management and user training. This edition will be organized by NanoLabNL/EUROnanoLAB  and hosted at MESA+ NanoLab, University of Twente.

Location: University of Twente, Enschede, the Netherlands on June 16-18, 2019.

Nano Innovation 2020 - School on nanotechnologies: processes and applications to sensors and actuators

The course is dedicated to Master degree and Ph.D students, as well as to scientists working in the wide field of micro- and nano-technology, offering the opportunity to learn about sensors and actuator fabrication and characterization processes, with attention to both planar and 3D technologies. Besides the lectures dedicated to single technology steps, building blocks of the silicon-based micro- and nano-fabrication technologies, there will be sessions dedicated to devices application areas, like sensors for Quantum Technologies, piezo actuators and other. The workshop will be completed with a live lesson from the FBK cleanroom CR D, to practically show some of the fundamental silicon processing steps. The school is organized by It-fab, the Italian network for Micro and Nano Fabrication research infrastructures, in collaboration with STMicroelectronics Italy.

Nano Innovation 2020 - School on nanotechnologies: processes and applications to sensors and actuators